| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor with high sensitivity, where a piezo- electric device with an excellent packaging used, a high resistance is not mounted on a substrate, and an output voltage to a constant acceleration does not drop until a low frequency area. SOLUTION: A plurality of rectangle piezo-electric crystal layers 41, 42, 43 laminated constitute a vibration part of a piezo-electric device 101. Then, the piezo-electric crystal layers 41, 43 are polarized, and then electrodes are formed on both faces of the layers 41, 43. The electrodes are extended to a connection part and a holding part retaining the vibration part, and are connected to end face electrodes 31, 32, 33 formed on side face of an acceleration sensor. Impedance formed by the piezo-electric layers 41, 43 and the electrodes of the both faces are mutually and electrically connected in parallel. The vibration part vibrates in a vibration space formed by a vibration resin sheet 5.
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