| 摘要 |
PURPOSE: A scanning probe with a thin film type actuator and an atomic force microscope including the same are provided to improve a scanning speed by using a thin film type actuator. CONSTITUTION: A scanning probe with a thin film type actuator and an atomic force microscope including the same comprise a laser source portion(100), a scanning probe(200), a light receiving portion(300), and a drive portion(400). The laser source portion(100) comprises the first, the second, and the third laser sources(110,120,130) to emit a plurality of laser beam to the scanning probe(200). The scanning probe(200) comprises the first servo-scanning probe(210), the second servo-scanning probe(230), and the third servo-scanning probe(250). The light receiving portion(300) receives the laser beams from the first, the second, and the third servo-scanning probes(210,230,250) and provides them to the drive portion(400). The drive portion(400) receives a light receiving signal and controls thin film type actuators(216,236,256).
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