| 发明名称 |
MEMS TRANSMISSION AND CIRCUIT COMPONENTS |
| 摘要 |
An Rf device (100) that comprises unique MEMS RF transmission and circuit components (104-106) that are integrated together on a semiconductor chip (101) to form the RF device (100). These MEMS components (104-106) are monolithically formed on the chip (101) and are also reconfigurable on the chip (101).
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| 申请公布号 |
WO0077877(A1) |
申请公布日期 |
2000.12.21 |
| 申请号 |
WO2000US16021 |
申请日期 |
2000.06.09 |
| 申请人 |
UNIVERSITY OF HAWAII;CHIAO, JUNG-CHIH |
发明人 |
CHIAO, JUNG-CHIH |
| 分类号 |
G02B6/26;G02B6/35;G02B26/08;H01Q3/44;H01Q3/46;(IPC1-7):H01P1/00;H01P1/20;H03H7/38;H01L25/14;H01L29/00;H01L29/82;H01H51/22 |
主分类号 |
G02B6/26 |
| 代理机构 |
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代理人 |
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