| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method for producing a ceramic bulk material free from warpage by a chemical vapor deposition method. SOLUTION: The surface of a base material 3 in which ceramic is formed and deposited by a chemical vapor deposition method is subjected to spherical working, and in the case the thermal expansion coefficient of the material to be vapor-deposited is smaller than that of the base material 3, the shape by the shperical working is formed into the recessed one, and in the case the thermal expansion coefficient of the material to be vapor-deposited is higher than that of the base material, the shape by the spherical working is formed into the projecting one. The ceramic stock to be produced is desirably composed of silicon carbide. |
