ELECTRON BEAM RADIATING DEVICE, AND ELECTRON BEAM DEPICTING DEVICE, SCAN-TYPE ELECTRON MICROSCOPE, AND POINT LIGHT SOURCE-TYPE X-RAY RADIATING DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide an electron beam high in brightness and low in emittance by providing a target for generating a laser plasma with radiation of pulse laser and an acceleration electrode for drawing the electron beam from laser plasma and accelerating it. SOLUTION: Pulse lasers 29 are ejected from a pulse laser device 32, are collected at a lens 31, enter a vacuum container 22 through a laser incident window 30, and are radiated to a metal target 23. Atoms in the metal target 23 are emitted from a surface by abrasion, and laser plasmas 34 high in density are generated. The laser plasmas 34 hardly dissipate after pulse time width of the pulse lasers 29, expand and diffuse. A boundary surface of the laser plasmas 34 reaching near a grid 25 outgoes as a surface shape so as to be bundled electron beams 35 for the outgoing direction using a voltage applied between the grid 25 and an acceleration electrode 26 by an acceleration power supply device 27, and electron beams of large-current and high density synchronous with the pulse lasers.