发明名称 METHOD AND DEVICE FOR DICING CERAMIC PLATE
摘要 PROBLEM TO BE SOLVED: To provide a method for dicing a ceramic plate which can be divided uniformly so that pattern electrodes may be allocated uniformly within cut members. SOLUTION: In this dicing method, a ceramic plate C that is formed by baking a green sheet with printed pattern electrodes at a specified pitch, is held on a rotary table, and it is cut along uniform dividing lines in a pitching direction and an orthogonal direction. A distance YA between a normal line and the rotary center of a side A on one end of the ceramic plate C in a pitching direction as well as a rotary angleθA is obtained, and then a distance YB between the normal line and the rotary center of a side B on the other end of the ceramic plate C as well as a rotary angleθB is obtained. Further, a distance Ym between the normal line and the rotary centers of each of cut positions of the ceramic plate C and a rotary angleθm are obtained according to the distances YA and YB and rotary anglesθA andθB. Finally, the ceramic plate C is cut along the obtained line.
申请公布号 JP2000252234(A) 申请公布日期 2000.09.14
申请号 JP19990047605 申请日期 1999.02.25
申请人 MURATA MFG CO LTD 发明人 YAMAGUCHI KAZUNOBU
分类号 H01L21/301;B28D5/00;(IPC1-7):H01L21/301 主分类号 H01L21/301
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