发明名称 |
METHOD AND APPARATUS FOR MANUFACTURING CDS THIN FILM BY CHEMICAL BATH DEPOSITION |
摘要 |
PURPOSE: A method and an apparatus for manufacturing cadmium sulfide are provided to significantly improve the quality of a film by controlling a CdS thin film formation condition and at the same time applying ultra supersonic waves to a reaction solution in which a thin film formation reaction is generated. CONSTITUTION: A method and an apparatus for manufacturing cadmium sulfide grows a CdS thin film in a substrate using chemical bath deposition(CBD)(or dip coating or solution growth) method. The reaction solution used in the CBD method comprises a cadimium acetate Cd(CH3COO)2, 0.004-0.016M, thiourea(NH2) CS 0.005-0.015M, a buffer solution NH4(CH3COO) 1.54-6.16gm, NH4OH 1.74M. The composed reaction solution is heated at the reaction temperature of 80 Celsius. A glass substrate is inserted into the reaction solution and ultrasonic waves are applied to the glass substrate and the reaction solution so that a chemical reaction can be accelerated.
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申请公布号 |
KR100264232(B1) |
申请公布日期 |
2000.09.01 |
申请号 |
KR19970026529 |
申请日期 |
1997.06.23 |
申请人 |
KOREA INSTITUTE OF ENERGY RESEARCH |
发明人 |
SONG, JIN-SU;KIM, DONG-HWAN;CHOI, JUN-YOUNG |
分类号 |
H01L21/20;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/20 |
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