| 摘要 |
PROBLEM TO BE SOLVED: To accurately draw a diagonal line with an arbitrary angle by forming one aperture mask for forming a beam in a rectangular shape, and composing the other aperture for forming a beam with a figure consisting of a smooth curve having a finite curvature and a straight line figure. SOLUTION: The image of an electron beam is formed on a second aperture for forming a beam that can be rotated with a center for swinging back a beam as an axis by a projecting lens through a first aperture mask 12 for forming a beam that can be rotated with the center for swinging back a beam as an axis. A formation aperture image that is synthesized by apertures 12a and 13a is reduced by a reduction lens. The first formation aperture 12a is formed in a rectangular shape, while the second formation aperture 13a is formed in a shape where a figure consisting of a smooth curve with a finite curvature and a straight line figure are combined. Also, the curvature center of a curved part is arranged on the concentric circle of a central point for swinging back the beam.
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