| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inclination changing device which can change the attitude of a substrate, with a simple structure. SOLUTION: This substrate attitude changing device is equipped with a conveyor roller 30, lift pins 41a, 41b, 41c, and 41d, and an air cylinder 51. The conveyor roller 30 supports the substrate W, so that the substrate W tilts to the horizontal surface as specified. The lift pins 41a, 41b, 41c, and 41d support the substrate W so that the substrate W is substantially horizontal, and move up and down about the conveyor roller 30. The air cylinder 51 moves up and down the lift pins 41a, 41b, 41c, and 41d about the conveyor roller 30. |
