| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a silicon carbide assembling wafer boat for semiconductor manufacture, wherein constituent components are easy to be replaced, damages are not caused by thermal stresses during heat treatment, long term usage is possible, and no particle contamination occurs to a semiconductor manufacturing apparatus and a semiconductor wafer. SOLUTION: A silicon carbide assembling wafer boat for semiconductor manufacture comprising silicon carbide wafer holding members 5, wherein grooves 2 for receiving semiconductor wafers are formed and locking parts 4 are provided at both ends 3 thereof, and two support silicon carbide base plates 7, 8, wherein affixing holes 6 for fixing the wafer holding members 5 are provided respectively, assembled by engaging silicon carbide engaging bodies 9 with the locking parts 4 passed through the affixing holes 6, wherein taper is formed in the engaging surface 10 of the engaging body and further the base members 5, 7, 8 and the locking body 9 are coated with a CVD-SiC film.</p> |
