BOAT OF SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A boat of semiconductor manufacturing apparatus is provided to operate in correct slots on performing preventive inspection. CONSTITUTION: A boat of semiconductor manufacturing apparatus includes an upper/lower plate(22b) maintaining a constant distance each other, a fixed bar(24) whose one end is combined to the upper plate and the other end is combined to the lower plate, slots(26) formed with a constant distance in the fixed bar(24) for inserted semiconductor wafers, a marking section(28) formed in a part of the fixed bar(24) and marks the turn of the slots in order from a predetermined turn of the fixed bar(24).