发明名称 Print head structure production, for thermal ink jet printer head, comprises applying multi-layer passivation coating onto patterned heating and conductive layers
摘要 Thermal ink jet printer head structure production comprises applying a multi-layer passivation coating onto patterned heating and conductive layers (204,206) on an insulating substrate. An Independent claim is also included for a thermal ink jet printer head structure produced by the above process. Preferred Features: The multi-layer passivation coating comprises a stack of alternate soft passivation layers, especially of silicon, silicon oxide and silicon dioxide (SiO2), and hard passivation layers, especially of silicon nitride (Si3N4) or silicon carbide (SiC).
申请公布号 DE19903381(A1) 申请公布日期 2000.04.27
申请号 DE19991003381 申请日期 1999.01.28
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, HSINCHU HSIEN 发明人 LEE, YIH-SHING;WU, YI-YUNG;CHENG, CHEN-YUE;CHIU, SAO-LING;HSU, HSIANG-CHEN
分类号 B41J2/14;B41J2/16;(IPC1-7):B41J2/05 主分类号 B41J2/14
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