| 摘要 |
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable around a vertical axis, translatable along the vertical axis, and translatable along a horizontal axis that rotates with the main arm around the vertical axis. An auxiliary arm is translatable along the horizontal axis relative to the main arm between extended and retracted positions. In the extended position, an end effector of the auxiliary arm is aligned with an end effector of the main arm for retrieving or replacing wafers with the auxiliary arm. In the retracted position, the end effector of the auxiliary arm is withdrawn for retrieving or replacing wafers with the main arm.
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