| 摘要 |
<p>A high temperature ultra-pure water production apparatus comprising an evaporator (22) for treating pre-treated water obtained from a pre-treatment system or primary pure water obtained from a primary pure water system (21) to obtain high temperature ultra-pure water, an ion exchange device (23) for removing trace amounts of metal ions contained in the ultra-pure water obtained by the evaporator (22), a product water heat exchanger (24) made of titanium, for subjecting high temperature ultra-pure water from which the trace amounts of metal ions are not yet removed as treated by the ion exchange device (23) and normal temperature ultra-pure water from which the trace amounts of metal ions are removed by the ion exchange device (23) to heat exchange, and a SUS cooler/heat exchanger (25) for cooling ultra-pure water from which the trace amounts of metal ions are not yet removed and which is cooled by the product water heat exchanger (24) to a temperature not higher than 40 °C and converting it to feed water to the ion exchanger (23). Ultra-pure water which is heated by the produced water heat exchanger (24) to a high temperature and from which the trace amounts of metal ions are removed is converted to electrolytic ion water or is mixed with a chemical, and is used in a processing step of a semiconductor fabrication process.</p> |
