| 摘要 |
PROBLEM TO BE SOLVED: To form a thin film excellent in thin film characteristics of being dense, high in adhesion or the like on the surface of a substrate. SOLUTION: The vicinity of a substrate 100 is provided with a primary induction electrode having a network part 124 and covering the substrate 100, and, while negative bias voltage is applied to the primary induction electrode, evaporated particles generated by an evaporated particle generating means 130 at the outside of the primary induction electrode are introduced from the network part 124 and are deposited on the surface of the substrate 100. As a result, the evaporated particles high in energy are largely deposited on the surface of the substrate to form a thin film excellent in thin film characteristics.
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