发明名称
摘要 A method of manufacturing a capacitor comprises a step of forming a first dielectric layer (5) composed of a ferroelectric material or a dielectric material possessing high permittivity on a first electrode (2), a step of sintering the first dielectric layer, a step of forming a second dielectric layer (7) on the first dielectric layer, and a step of forming a second electrode (4) on the second dielectric layer (7).
申请公布号 JP3012785(B2) 申请公布日期 2000.02.28
申请号 JP19950178524 申请日期 1995.07.14
申请人 发明人
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L27/10;H01L27/105;H01L27/108 主分类号 H01L27/04
代理机构 代理人
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