| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection performance by efficiently exhausting an ion source part during the evacuation before the measurement to reduce a residual content of the part. SOLUTION: A branch pipe 25 is provided on a vacuum container 10 side of a valve 23 of piping 22 for introducing a gas to be measured, the other end is connected to a part other than an ion source 11 of the vacuum container 10, and a valve 24 is inserted in the branch pipe 25. The valves 23, 24 are controlled by a valve controller 26 so that when one is opened, the other is closed.
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