| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal ball array method and device that have a means for detecting abnormal metal ball suction in a simple and reliable way. SOLUTION: Metal balls 4 are sucked onto metal ball suction holes 6 formed in a metal ball array jig 1. The group of metal balls 4 is transferred to the substrate to be arrayed and mounted on the substrate in batch. In this method, the suction of all metal balls 4 on the metal ball suction holes 6 of the metal ball array jig 1 is checked by detecting the air-flow velocity in a vacuum exhaust path on the rear side of the metal ball suction holes 6 of the metal ball suction jig 1. A heat-wire anemometer 8 is suitable as means for detecting air-flow velocity. |
