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经营范围
发明名称
ION IMPLANTATION SIMULATION METHOD
摘要
申请公布号
JPH11307469(A)
申请公布日期
1999.11.05
申请号
JP19980110283
申请日期
1998.04.21
申请人
SONY CORP
发明人
KOBAYASHI TAKESHI
分类号
H01L21/66;H01L21/00;H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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