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发明名称
Cathodic arc vapor deposition apparatus
摘要
申请公布号
SG67546(A1)
申请公布日期
1999.09.21
申请号
SG19980003308
申请日期
1998.08.27
申请人
UNITED TECHNOLOGIES CORPORATION
发明人
BEERS, RUSSELL, A.;HENDRICKS, ROBERT, E.;MARSZAL, DEAN, N.;NOETZEL, ALLAN, A.;WRIGHT, ROBERT, J.;ROYAL, TYRUS, E.
分类号
C23C14/24;H01J37/32;(IPC1-7):C23C14/24;C23C14/32
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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