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发明名称
MAGNETRON TYPE SPUTTERING APPARATUS
摘要
申请公布号
KR200141803(Y1)
申请公布日期
1999.06.01
申请号
KR19930003691U
申请日期
1993.03.13
申请人
LG ELECTRONICS CORP.
发明人
KIM, SUNG-HWAN
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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