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发明名称
SEMICONDUCTOR WAFER SEARCH APPARATUS
摘要
申请公布号
KR139982(Y1)
申请公布日期
1999.04.15
申请号
KR19960022434U
申请日期
1996.07.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, JUN-HO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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