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摘要
申请公布号
JP2867628(B2)
申请公布日期
1999.03.08
申请号
JP19900160892
申请日期
1990.06.19
申请人
NITSUSHIN DENKI KK
发明人
SENOO KAZUHIRO
分类号
C23C14/48;H01J37/248;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
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