ORGANOMETALLIC SINGLE SOURCE PRECURSOR FOR INORGANIC FILM COATING AND POWDER,申请号JP19980099854-传众专利搜索

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发明名称	ORGANOMETALLIC SINGLE SOURCE PRECURSOR FOR INORGANIC FILM COATING AND POWDER
摘要
申请公布号	JPH1149780(A)	申请公布日期	1999.02.23
申请号	JP19980099854	申请日期	1998.03.30
申请人	ATWOOD DAVID ALLAN	发明人	ATWOOD DAVID ALLAN
分类号	C01F7/30;C07F5/06;C23C26/00;H01L21/316;(IPC1-7):C07F5/06	主分类号	C01F7/30
代理机构		代理人
主权项
地址

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