发明名称 |
Process and auxiliary device for fabricating semiconductor devices |
摘要 |
An auxiliary device is constituted by a U-bolt-shaped, pincer-like implement which, during the fabrication of semiconductor devices with a mesa structure from a starting substrate forming a wafer, serves to transfer the outline geometry of the individual semiconductor devices from one side of the wafer to the back of the wafer. The implement has at least one tracer at the end of one of its arms for engaging a sawed groove and for guiding the implement along the sawed groove on one side of the wafer. At the end of the other arm, a marking device with at least one marking stylus is provided whereby the course of the at least one sawed grooved can be transferred from the front side of the wafer to the back, and scribed there in the form of auxiliary lines.
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申请公布号 |
US5858808(A) |
申请公布日期 |
1999.01.12 |
申请号 |
US19970784002 |
申请日期 |
1997.01.15 |
申请人 |
DEUTSCHE ITT INDUSTRIES GMBH |
发明人 |
IGEL, GUNTER;SCHROEDER, JOHANN |
分类号 |
H01L21/304;H01L21/78;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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