发明名称 |
METHOD AND APPARATUS FOR SPIN-COATING CHEMICALS |
摘要 |
An apparatus (100) and a method for spin-coating chemicals over a surface of a substrate (130) is disclosed. The apparatus includes a bowl (102) for supporting a substrate (130), a plurality of drain holes defined below the level of the substrate (130), a lid (101) having a flat surface that mates with the bowl (102), and a plurality of injection holes (121) defined in the bowl (102) for applying a solvent to an underside of the substrate, are included. The plurality of injection holes (121) are defined in along an injection ring (227) that is configured to receive the liquid solvent that is to be applied near an outer radius of the underside of the substrate, and the injection ring (227) is spaced apart from the underside of the substrate (130).
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申请公布号 |
WO9853923(A1) |
申请公布日期 |
1998.12.03 |
申请号 |
WO1998US10958 |
申请日期 |
1998.05.29 |
申请人 |
THE FAIRCHILD CORPORATION |
发明人 |
MAHNEKE, PETER;BATCHELDER, WILLIAM, T. |
分类号 |
B05D1/40;B05C11/08;B05D1/00;G03F7/16;H01L21/027;H01L21/312;H01L21/314;(IPC1-7):B05D3/12;B05D3/02;B05C13/00;B05C13/02;H01L21/469 |
主分类号 |
B05D1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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