| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to obtain uniform liquid crystal molecule orientation with a large screen having a high pre-tilt angle in liquid crystal molecule orientation processing by irradiating a substrate surface having a formed organic film with ions in an oblique direction under vacuum. SOLUTION: For instance, Ar ion irradiation is performed in a vacuum device of 5×10<-3> Torr. The Ar ion supplied from an ion source 101 is accelerated by an acceleration electrode 111 to be radiated toward the organic film 105. Switching elements such as a liquid crystal driving electrode 106 and a TFT element, etc., are formed on a glass substrate 108, and further, the organic film 105 consisting of soluble polyimido is applied on it by a print method. The Ar ion of an acceleration voltage 100V and current density 20μA/cm<2> is irradiated from the direction 103. An irradiation angleθ(104) is made 45 deg., and the Ar ion is moved in the directions 109, 110 at a speed of 1cm/second, and the orientation processing is performed. A TN liquid crystal device is constituted by combining with a color filter side plate performed with the orientation processing by the similar ion irradiation of the direction in the substrate surface different by 90 deg. and enclosing liquid crystal material between the substrates. |
