METHOD FOR ANALYZING IMPURITIES IN GAS AND ITS ANALYZER

摘要

Object gas is ionized and the intensity of cluster ions produced from the main component gas and the impurity gas in the object gas is measured by a mass spectrometer (6) to determine the amount of impurity gas in the object gas. An analyzer for impurities in object gas comprises a mass spectrometer (6) which has a means for ionizing the introduced gas, an analysis line (4) through which the object gas is introduced into the mass spectrometer (6) and a calibration line (10) which introduces the object gas into the mass spectrometer (6) after the impurity concentration in the object gas is controlled. <IMAGE>