发明名称 SYSTEM AND METHOD FOR INHIBITING RADIATIVE EMISSION OF A LASER-SUSTAINED PLASMA SOURCE
摘要 A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.
申请公布号 WO2016112326(A1) 申请公布日期 2016.07.14
申请号 WO2016US12707 申请日期 2016.01.08
申请人 KLA-TENCOR CORPORATION 发明人 BEZEL, ILYA;SHCHEMELININ, ANATOLY;GROSS, KENNETH P.;SOLARZ, RICHARD;WILSON, LAUREN;YADAV, RAHUL;WITTENBERG, JOSHUA;CHIMMALGI, ANANT;LIU, XIUMEI;BRUGUIER, BROOKE
分类号 H01J65/04 主分类号 H01J65/04
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