Process and apparatus for the supply of ultra-pure helium

摘要

Process for supplying ultra-pure helium to a user involves extracting helium in liquid or supercritical form from a storage tank (3), filtering it in this form (in 4), vaporizing the filtered helium and sending the resulting gas to the user. Installation for the supply of ultra-pure helium with the following elements mounted in series: a storage tank (3) of liquid or supercritical helium; a filter (4) which can filter liquid or supercritical helium, connected to the bottom of the tank; means of vaporizing the filtered helium, and a user supply line.