| 摘要 |
PROBLEM TO BE SOLVED: To suppress the positional deviation of an optical system by integrating an optical fiber for illumination, a double-mode channel waveguide and a microbeam splitter into one body. SOLUTION: The optical fiber for illumination, the double-mode channel waveguide 9 and the microbeam splitter 3 are integrated into one body. Then, linearly polarized light emitted from a light source 1 is guided to the splitter 3 through a polarization (plane) maintaining fiber 2 and the light reflected on its is converted into the circularity polarized light by a 1/4 wavelength plate 4. Thereafter, it is made incident on an objective lens 6 through an X-Y two-dimensional scanner 5 and condensed on specimen 7. The light reflected on the specimen 7 is converted into the linearly polarized light again, passed through the splitter 3 and condensed on the end surface of the waveguide 9. The asymmetry of the light propagated in the waveguide 9 is detected by a branching area 10, channel waveguides 11 and 12 and optical detectors 13 and 14. |
