| 摘要 |
A method and apparatus for modulating an optical signal, and a method for fabricating such an apparatus. The modulator comprises a membrane having at least one layer, and a substrate, spaced to form a air gap. The membrane is suspended in a first position over the substrate by a flexible support arrangement such that the size of the air gap may vary. The layers of the membrane are formed so that the refractive indices of such layers have a particular relationship to the refractive index of the substrate, and have a particular thickness. Bias is applied to the membrane and the substrate to create a force that causes the membrane to change its position relative to the substrate, causing the size of the air gap to change. The reflectivity of the device to an optical signal varies as the size of the air gap changes.
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