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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH08283941(A)
申请公布日期
1996.10.29
申请号
JP19950113540
申请日期
1995.04.13
申请人
SONY CORP
发明人
MASUMOTO MASAYUKI
分类号
C23C14/34;C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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