Coaxial wafer probe with tip shielding

摘要

A shielded microwave probe tip assembly includes an end of a coaxial cable coupled to probe fingers forming a coplanar controlled impedance microwave transmission line where the ground probe fingers are interconnected by a shield member that is spaced apart from the signal line probe finger but is positioned between the signal line probe finger and a device under test. The shield prevents the generation of extraneous signals or parasitic coupling from the device under test which would otherwise degrade measurement accuracy.