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发明名称
BARE CHIP INSPECTION MACHINE
摘要
申请公布号
JPH08195419(A)
申请公布日期
1996.07.30
申请号
JP19950020916
申请日期
1995.01.17
申请人
SANKYO SEIKI MFG CO LTD;FUJITSU LTD
发明人
WATANABE TAKASHI;TESHIROGI SHOICHI;FUNAKI SHOICHI
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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