SUSCEPTOR AND ITS MANUFACTURE,申请号JP19950034189-传众专利搜索

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发明名称	SUSCEPTOR AND ITS MANUFACTURE
摘要	<p>PURPOSE:To provide a susceptor which solves the problem in conventional art and does not generate impurities, and besides does not cause cracks even in use at high temperature since there is no pore in the surface. CONSTITUTION:This susceptor consists of glassy carbon derived from polycarbodiimide resin, and for the manufacture of a susceptor, a composition consisting of polycarbodiimide resin or consisting mainly of polycarbodiimide resin is molded into the shape of a susceptor, and next the molded item is carbonated.</p>
申请公布号	JPH07263366(A)	申请公布日期	1995.10.13
申请号	JP19950034189	申请日期	1995.01.31
申请人	NISSHINBO IND INC	发明人	SAITO KAZUO;ISHIMATSU TAKESHI
分类号	C23C14/50;H01L21/205;H01L21/31;H01L21/68;H01L21/683;(IPC1-7):H01L21/205	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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