| 摘要 |
PURPOSE:To provide a limiting current type oxygen sensor having an excellent characteristic and high reliability. CONSTITUTION:A porous insulating film 2 derived to the periphery of a board as the oxygen gas supply parts 21 and 22 whose part has diffusion controllability, is formed on the alumina board 1, and a Pt cathode electrode 3 of a flat structure, a stabilized zirconia film 4 and a Pt anode electrode 5 of a comb-shaped pattern are laminated and formed on this by a dry process. A part of the insulating film 2 is derived to the board peripheral part as the oxygen gas supply parts 21 and 22. A glass sealing layer 6 is formed of a center extracted pattern which covers the peripheral parts of the stabilized zirconia film 4 and the insulating film 2 and from which a surface forming the anode electrode 5 and the oxygen gas supply parts 21 and 22 of the insulating film 2 are exposed. |
