| 摘要 |
PURPOSE:To provide a method for manufacturing a high quality optical resin thin film in a good yield wherein inferiority due to sticking of foreign matters is small, and flaws, wrinkles, etc., are not generated. CONSTITUTION:An organic solvent capable of dissolving a resin is discharged from a nozzle toward a peripheral fringe part of a support substrate under a state wherein the support substrate 1 is rotated in succession to spin coating, and a coating of a side surface part of the support substrate 1 in resin coating 2 formed on the support substrate 1 and the coating within a range of 0-5mm toward an inside from an outer peripheral edge part of the support substrate 1 are dissolved to be removed. Thereafter, the coating is separated from the support substrate. |
