| 摘要 |
PURPOSE:To provide an X-ray inspection method and its system by which a clear transmissive X-ray picture can be obtained from an object to be inspected. CONSTITUTION:The system is provided with an X-ray source 101, an XY positioning stage 103 which positions a mounting table for a sample to be inspected 102 by moving it in X and Y directions, an X-ray optical conversion means 108 which detects a transmissive X-ray picture transmitted from the sample by applying an X-ray emitted from the source 101 onto the sample and converts it into an optical picture, and a photoelectric conversion means 110 which receives the detected optical picture and detects it as a transmission density X-ray picture signal. Further, the system is also provided with a noise removal means for removing noise elements from the transmission density X-ray picture signal, a level conversion means which converts the transmission density X-ray picture signal with any noise removed into a signal level corresponding to the sample thickness, and a level correction means for correcting changes in the detected signal level. |
