发明名称 MIST OR STEAM CONDENSING RECOVERY DEVICE
摘要 <p>PURPOSE:To easily and inexpensively decrease the quantity of liquid chemicals carried away by exhaust by providing a throttle valve 9 in piping for exhaust flow, providing a liquid receiver part 5 on the downstream side of the throttle valve 9 and making piping rise upwards from the receiver part. CONSTITUTION:A throttle valve 9 is provided in mid-way of exhaust piping 1-2-4 and a liquid receiver part 5 is provided on the downstream side of the throttle valve 9. Piping is made to rise upwards from the liquid receiving part 5 which is provided with a liquid recovery means 7. The exhaust flow of mist and steam which liquid is heated and evaporated by a heater 13 is passed through the exhaust piping 4 to reach the throttle valve 9. When the exhaust flow directly passes through the valve 9, it undergoes temperature drop by adiabatic expansion and is condensed to form liquid which falls to the liquid receiving part 5 to become a collected and recovered liquid 14. The exhaust flow deprived of mist and steam content is passed through the exhaust piping 2 to be discharged by a fan 6. And liquid which the exhaust is cooled and liquefied in a riser part H1 of the piping falls along the wall surface of the piping to be collected in the liquid receiver part 5.</p>
申请公布号 JPH06190227(A) 申请公布日期 1994.07.12
申请号 JP19920346157 申请日期 1992.12.25
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MIYAMOTO KENICHI;INOUE ISAMU;HAKODA SHUZO;KURODA HIROSHI
分类号 B01D45/06;B01D5/00;B01D47/02;B01D53/26;H01L21/304;H01L21/306;(IPC1-7):B01D45/06 主分类号 B01D45/06
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