PRODUCTION OF SEMICONDUCTOR DEVICE,申请号JP19920258251-传众专利搜索

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发明名称	PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH06112203(A)	申请公布日期	1994.04.22
申请号	JP19920258251	申请日期	1992.09.28
申请人	FUJITSU LTD	发明人	YAMANE SHUICHI
分类号	H01L21/28;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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