Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing the same.

摘要

A superconducting device comprising a substrate (5) having a principal surface, a superconducting source region (2) and a superconducting drain region (3) formed of an oxide superconductor on the principal surface of the substrate separated from each other, an extremely thin superconducting channel formed of the oxide superconductor between the superconducting source region and the superconducting drain region. The superconducting channel electrically connects the superconducting source region to a superconducting drain region, so that a superconducting current can flow through the superconducting channel between the superconducting source region and the superconducting drain region. The superconducting device comprises a gate electrode (4) through a gate insulator (7) on the superconducting channel for controlling the superconducting current flowing through the superconducting channel, and non-superconducting oxide layers (22,23) having a similar crystal structure to that of the oxide superconductor. The non-superconducting oxide layers (22,23) contact with at least the superconducting source region (2) and the superconducting drain region (3). In the superconducting device, the superconducting channel, the superconducting source region (2) and the superconducting drain region (3) are formed of one oxide superconductor thin film of which the center portion is c-axis oriented and both ends are a-axis oriented.