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发明名称
METHOD OF WAFER TRANSFER AND WAFER-CASSETTE TRANSPORTATION
摘要
申请公布号
JPH05175314(A)
申请公布日期
1993.07.13
申请号
JP19910338352
申请日期
1991.12.20
申请人
KAWASAKI STEEL CORP
发明人
KAYANO TOMOO
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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