METHOD OF FORMING THIN FILM,申请号JP19910349510-传众专利搜索

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发明名称	METHOD OF FORMING THIN FILM
摘要
申请公布号	JPH05160038(A)	申请公布日期	1993.06.25
申请号	JP19910349510	申请日期	1991.12.09
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	NISHIDA TOSHIO;TAMAMURA TOSHIAKI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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