| 摘要 |
<p>PURPOSE: To reduce the time required for alignment so as to improve productivity and realize miniaturization of a semiconductor chip by enabling simultaneous alignment of the semiconductor chip in a X-direction and a Y-direction utilizing a triangular basic target and a bar-like target. CONSTITUTION: Triangular X-direction scanning basic targets 10-a, 10-b, 10-c, 10-d and Y-direction scanning basic targets (20-a, 20-b, 20-c, 20-d) which enable simultaneous X-alignment and Y-alignment, and a bar-like target 30 for theta- direction alignment are formed selectively at arbitrary positions at four corners of a semiconductor chip. Utilizing the triangular basic targets 10, (20) and the bar-like target 30, alignment in both the X- and Y-directions is simultaneously carried out simply by scanning in the X-direction or the Y-direction. Thus, an etching region of the semiconductor chip can be reduced and the semiconductor chip can be miniaturized.</p> |
