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发明名称
INSPECTING APPARATUS FOR LOGIC CIRCUIT
摘要
申请公布号
JPH0593764(A)
申请公布日期
1993.04.16
申请号
JP19910254898
申请日期
1991.10.02
申请人
NEC CORP
发明人
ITO HIROO
分类号
G01R31/317;G01R31/28;H03K19/00
主分类号
G01R31/317
代理机构
代理人
主权项
地址
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