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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH0593915(A)
申请公布日期
1993.04.16
申请号
JP19910039935
申请日期
1991.03.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAKANISHI AKIRA;MURAKAWA SATORU;ITO MASAHIRO
分类号
G02F1/1333;G02F1/1343;H01B13/00;H01L21/316;H01L21/3205;H05K3/10
主分类号
G02F1/1333
代理机构
代理人
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