| 摘要 |
PURPOSE:To automatize feeding/taking an internal layer board to/out of a reduction chamber by equipping a loader provided with the transfer function, middle platform provided with a feeding/taking out apparatus and the transfer function and unloader provided with the transfer function in front of the reducing chamber. CONSTITUTION:A reduction chamber 1 consists of reducing gas feeder, inert gas feeder or treating/circulating apparatus and shield door 11 which is used when a waste gas treating apparatus is connected as required. In front of the reduction chamber 1, equipped are a loader 21 provided with the transfer function, a middle platform 23 provided with a feeding/taking out apparatus and the transfer function and an unloader 24 provided with the transfer function. The inert gas feeder is connected to the middle platform 23. Shielding means are provided at the inlet and back parts of the loader 21, and the front part and the outlet of the unloader 24 to prevent mixing. This facilitates the automatization. |
