Pressure converter.

摘要

A sensor chip (13) is disposed as opposed to a pressure detecting hole (12) formed in a fluid pipe (11). The rear surface side of the sensor chip including a diaphragm part (14) is coated with a silicon oxynitride film (15). An O-ring (18) is inserted in a groove part (17) formed in the periphery of the pressure detecting hole of the fluid pipe. A connecting electrode 20 of a flexible circuit (21) and the output terminal of the sensor chip are electrically connected by soldering. A pressing lid (23) is fit into a pressing lid fitting part formed in the lateral wall of the fluid pipe. A protuberant part (24) of this pressing lid imparts pressing force of suitable magnitude between the O-ring and the sensor chip.