| 摘要 |
A high-speed flow rate control valve of the invention has a structure which uses the piezoelectric actuator as a driving source, exhibits large opening and closing forces, and maintains precision high enough to control a high fluid pressure. To realize this, use is made of first conversion means which amplifies linear displacement of a laminated piezoelectric actuator and converts it into a rotational displacement, and second conversion means which reversely converts the rotational displacement back into the linear displacement to drive a valve spool. Owing to the above constitution, the conversion portion is mechanically constituted between the laminated piezoelectric actuator and the valve spool. Since the fluid pressure does not affect the actuator, it is possible to control the fluid of a medium to high pressure. Further, the use of the laminated piezoelectric actuator helps increase the control speed.
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